High Frequency Miniature Ultra Thin Linear Motor For Wafer Control
| محل منبع | جیانگسو ، چین |
|---|---|
| نام تجاری | SUPT |
| گواهی | 3C, CE, ISO9001 |
| شماره مدل | یک سری |
| مقدار حداقل تعداد سفارش | ≥1 |
| قیمت | $150.00/pieces >=1 pieces |
| جزئیات بسته بندی | <i>in carton and as customer requirements</i> <b>در کارتن و به عنوان نیاز مشتری</b><br> <i>small lin |
| زمان تحویل | <i>1-5pcs ,5 days .</i> <b>1-5 عدد، 5 روز.</b> <i>>20pcs ,To be negotiated</i> <b>> 20 عدد، قا |
| شرایط پرداخت | T/T |
| قابلیت ارائه | مورد مذاکره قرار گیرد |
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x| گارانتی | 3 ماه - 1 سال | استفاده | قایق، ماشین، دوچرخه برقی، پهپاد، ربات، ونتیلاتور پزشکی، میکروسکوپ، آندوسکوپ، اپتیک، لنز نوری |
|---|---|---|---|
| تایپ کنید | میکرو موتور | گشتاور | درخواست ها |
| ساخت و ساز | آهنربای دائمی | محافظت از ویژگی | کاملاً محصور |
| سرعت (RPM) | با سرعت زیاد | جریان پیوسته (A) | فعلی |
| کارایی | IE 1 | نام محصول | محرک خطی |
| برنامه | محصول اتوماتیک | نوع موتور | موتور دائمی |
| کلمات کلیدی | موتور خطی کوچک | نام | موتور سری |
| ولتاژ نامی | 1.2-12 ولت | اندازه | 30 میلی متر |
| رنگ | نقره ای | مورد | مینی موتورهای الکتریکی |
| بسته بندی | در کارتن | بندر | بندر شانگهای |
Product Description:
The linear motor's armature consists solely of coils without magnets, eliminating magnetic attraction between moving and stationary parts. This design prevents cogging effects, ensuring smooth operation. Its lightweight construction enables high-speed and high-acceleration performance. The thrust characteristics are smooth, achieving high precision when paired with linear encoders. The stroke can be extended arbitrarily, operating silently and maintenance-free. Features imported epoxy resin vacuum-filled at high temperature and pressure, along with highly flexible power cables. Widely applied in semiconductor manufacturing equipment, precision testing equipment for the flat-panel display industry, laser cutting/marking machines, and machine vision inspection systems. Modular design allows for custom machining.
Linear motor technology is the core driver advancing semiconductor manufacturing equipment, serving as the essential direct drive for achieving precise wafer positioning and high-speed motion.
Leveraging its high precision, speed, acceleration, and smooth motion characteristics, the linear motor enables precise wafer extraction from cassettes within wafer transfer systems, high-accuracy placement onto processing stations, and rapid return of wafers to cassettes post-processing.
Within precision positioning platforms, linear motors support and precisely position wafers. Wafer carriers must perform nanometer-level stepping and scanning movements within the XY plane to complete exposure. In microscopes and defect detection equipment, wafers must also be accurately moved beneath inspection probes.
Product Parameters:
| Linear motor performance parameters | |||||||
| A Series--MLCA(Dynamic) MLFA(Stator) | |||||||
| Model/Par | MLCA-0020-075-00 | MLCA-0040-135-00 | MLCA-0080-255-00 | ||||
| Peak force(Fp) | N | 60 | 120 | 240 | |||
| Peak current(lp) | Amps | 4.8 | 4.2 | 4.2 | |||
| Continuous force(Fc) | N | 20 | 40 | 80 | |||
| Continuous current(lc) | Amps | 1.6 | 1.4 | 1.4 | |||
| Actuator constants(DC motor conversion/3p)(Ka) | N/W | 5.65 | 7.9 | 11.2 | |||
| Constant Thrust(L-L)(Kf) | N/Amps | 15.3 | 30.4 | 60.3 | |||
| Back EMF constant(L-L)(Kb) | V/m/sec | 8.8 | 17.6 | 34.8 | |||
| Electrical constant(Te) | ms | 0.3 | 0.3 | 0.3 | |||
| Resistance(L-L)(R) | @25℃Ω | 4.8 | 9.4 | 19.2 | |||
| Inductance(L-L)(l) | mh | 1.51 | 3 | 6 | |||
| Heat transfer coefficient(Rth) | ℃/W | *3.9 | *1.9 | **1.3 | |||
| Coil maximum temperature(Tmax) | ℃ | 120 | 120 | 120 | |||
| Magnet Pole pitch(2T) | mm | 30 | 30 | 30 | |||
| Mover weight | Kg | 0.24 | 0.42 | 0.82 | |||
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Linear Motors Compared to Traditional Rotating Motors:
| Characteristics | Linear Motor | Traditional Transmission Methods (Screw/Belt) | ||||
| High Precision | Direct drive with no intermediate transmission components eliminates backlash and backlash error, enabling nanometer level positioning accuracy. | Backlash, elastic deformation, and friction exist, limiting precision typically to the micrometer level. | ||||
| High Speed and Acceleration |
Reaches speeds of several meters per second and accelerations exceeding 10G, significantly boosting equipment throughput. |
Limited by screw rotational,speed and inertia, resulting in lower speed and acceleration. | ||||
| High Smoothness | Smooth motion with non-contact transmission and minimal vibration. Critical for vibration-sensitive processes like lithography. |
Contact friction within the transmission chain can generate vibration and noise. |
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| High Cleanliness | Lubrication-free operation eliminates grease or wear particles, meeting the ultra- high cleanliness requirements of semiconductor manufacturing. |
Lubrication is required, posing a contamination risk. |
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| High Reliability and Long Service Life |
Primary and moving parts (magnetic track and coil) have no mechanical contact, resulting in minimal wear and extended lifespan. |
Multiple mechanical contact points are subject to wear, requiring regular maintenance. |
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| Vacuum Compatibility | Easily designed for vacuum- compatible models, making it ideal for vacuum process equipment. |
Lubrication and heat dissipation pose significant challenges in vacuum environments. |
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