High Response Linear Voice Coil Actuator For Semiconductor Wafer Inspection

Linear voice coil actuators are especially suitable for precision processes such as alignment, sorting, and wafer handling in semiconductor production lines. Their zero backlash and high repeatability ensure highly accurate micro-displacement operations. The frictionless motion structure further enhances dynamic response capability, making them ideal actuators for precision industrial control systems.

SUPT’s shaft-mounted linear voice coil motor, model VCAB0044-0075-00A, features an integrated motion shaft combined with durable linear bearings to deliver exceptionally smooth motion even under high dynamic loads. Its internal configuration includes a high-energy permanent magnet and a lightweight moving coil, achieving minimal inertia and enabling rapid changes in output force—an essential characteristic for high-performance direct-drive actuators.

Unlike conventional screw-based or gear-driven systems, the VCAB series eliminates all mechanical transmission elements, providing true zero-backlash operation and reducing positioning errors caused by wear or friction. With millisecond-level responsiveness, the motor excels in applications requiring frequent speed adjustments, such as high-speed sorting, machine-vision alignment, and precision motion control stages. When integrated with closed-loop sensing, it can achieve excellent positioning accuracy and repeatability.